Semiconductor manufacturing relies on high-purity vacuum environments, and dry rotary vacuum pumps provide oil-free ultra-high vacuum (10 ⁻ ³ Pa) during etching and coating processes to avoid particle contamination of wafers. Low vibration design ensures the stability of precision equipment, coupled with He leakage detection to ensure the sealing of the cavity. By 2025, the semiconductor industry will account for 44% of the dry pump market share, and domestic substitution will accelerate the demand for customized driving.